Perspectives of development of multiinstrumental atomic-force microscopy under nanometric researches of components of microsystem equipment

Abstract

The paper shows the prospects for the creation and development of multiinstrument measuring instruments of atomic force microscopy, which can be used to conduct complex nanometric studies of components of microsystem equipment. A computer simulation of the design of a multi-probe chip based on electron-thermal separation of a massive piezochip base material into separate domain-dissipative zones that are mechanically and energetically independent from one another is proposed and carried out.