Indicators for evaluation of economic efficiency of metrological equipment of the atomic-force microscopy in the stage of design

Abstract

The paper presents an approach for estimating and calculating the economic efficiency of metrological equipment of atomic-force microscopy, which is created to control devices of micro- and nanoelectronics at the stage of their design. It is estimated that the creation of a modern metrological laboratory using the atomic force microscopy method in the conditions of the modern Ukrainian economy will make it possible to reach profit only after 32-38 months by reduction the time of control with a simultaneous decrease in the proportion of products which are not satisfying the requirements of modern micro and nanoelectronic devices.